V.Lisovskiy, photo(4 K)

Valeriy A. Lisovskiy

Dep. of Physics and Technologies
Kharkov National University
Kharkov 61077 Ukraine
Phone: (380 572) 352550
E-mail: lisovskiy@yahoo.com
URL: http://www-pht.univer.kharkov.ua/kft/val/e_valera.htm

C.Sc. (Phys. & Math.) [Ph.D.],
Leader of RF System Group

Data:

EDUCATION: The Kharkov State University:--B.Sc. in Physics, 1990 The Kharkov State University:--Ph.D. in Physics, 1993.

EXPERIENCE: January 1997 to present, Leader of RF System Group, Kharkov National University, 1995 to 1996, Senior Scientific Researcher, Kharkov State University, 1994 to 1995, Scientific Researcher, Scientific Center of Physics and Technology; 2001 to 2004, Researcher, Ecole Polytechnique, France.

PRESENT STUDIES: Theoretical and experimental basic and applied research in nonequilibrium plasmas, plasma processing of thin films, probe and optical spectroscopic measurements. Electron transport in gases. Namely:

  • Low-pressure gas breakdown in RF, DC, combined (RF + DC) and microwave electric fields.
  • Structure and properties of the RF capacitively coupled discharge.
  • Structure and properties of the DC and combined discharges.
  • Low-temperature plasma processing (etching, anodisation, nitridation).
  • Theoretical investigation of electrode boundary sheaths characteristics.
  • Determination of electron drift velocity and other electron transport parameters in gases from RF and DC breakdown curves.
  • Low-pressure RF and DC magnetron discharges.
  • Plasma sterilization in the low-pressure capacitive RF discharge.

Representative Publications

  • V.A. Lisovskiy, N.Yu. Kropotov, and V.I. Farenik "Influence of secondary electron emission on the rf breakdown of a gas at low pressure." Technical Physics Letters, 1996, Vol. 22, No. 12, pp. 1029-1031.
  • N.Yu. Kropotov, Yu.A. Kachanov, A.G. Reuka, V.A. Lisovskiy, V.D. Yegorenkov, and V.I. Farenik "Breakdown of low-pressure gas in uniform rf field" Soviet Technical Physics Letters, 1988, Vol. 14, No. 2, pp. 159-160.
  • N.Yu. Kropotov, V.A. Lisovskiy, Yu.A. Kachanov, V.D. Yegorenkov, and V.I. Farenik "Current-voltage characteristics of the low-current form of an E-type rf discharge" Soviet Technical Physics Letters, 1989, Vol. 15, No. 11, pp. 836-837.
  • V.A. Lisovskiy and V.D. Yegorenkov "Breakdown of a low-pressure gas in combined fields" Soviet Technical Physics Letters, 1992, Vol. 18, No. 9, pp. 573-575.
  • V.A. Lisovskiy "Structure of a low-pressure discharge in combined fields" Soviet Technical Physics Letters, 1992, Vol. 18, No. 10, pp. 616-618.
  • V.A. Lisovskiy, V.D. Yegorenkov, and O.V. Krasnikov "Alpha-gamma transition and low-frequency instability of a low-pressure rf discharge" Technical Physics Letters, 1993, Vol. 19, No. 11, pp. 701-702.
  • V.A. Lisovskiy and V.D. Yegorenkov "Phenomenological description of hf breakdown of gas at low pressures" Technical Physics Letters, 1994, Vol. 20, No. 11, pp. 920-922.
  • V.A. Lisovskiy and O.V. Krasnikov "Behavior of the space potential of a low-pressure rf discharge plasma" Technical Physics Letters, 1995, Vol. 21, No. 11, pp. 931-932.
  • V.A. Lisovskiy and V.D. Yegorenkov "Low-pressure gas breakdown in combined fields" J. Phys. D: Appl. Phys., 1994, Vol. 27, No. 11, pp. 2340-2348. V. A. Lisovskiy "Features of the alpha - gamma transition in a low-pressure rf argon discharge" Technical Physics, 1998, Vol. 43, No. 5, pp. 526-534.
  • V.A. Lisovskiy "Determination of electron transport coefficients in argon from ignition curves of rf and combined low-pressure discharges" Technical Physics Letters, 1998, Vol. 24, No. 4, pp. 308-310.
  • V.A. Lisovskiy and V.D. Yegorenkov " Rf breakdown of low pressure gas and a novel method for electron drift velocity determination in gases" J. Phys. D: Appl. Phys. , 1998, Vol. 31, No. 23, pp. 3349-3357.
  • V.A. Lisovskiy, V.D. Yegorenkov "Electron-drift velocity determination in CF4 and SF6 in a strong electric field from breakdown curves of low-pressure RF discharge." J. Phys. D: Appl. Phys., 1999, Vol. 32, No. 20, pp. 2645-2648.
  • V. A. Lisovskiy "Criterion for microwave breakdown of gases" Technical Physics, 1999, Vol. 44, No. 11, pp. 1282-1285.
  • V. A. Lisovskiy and S. D. Yakovin "A Modified Paschen Law for the Initiation of a DC Glow Discharge in Inert Gases" Technical Physics, 2000, Vol. 45, No. 6, pp. 727-731.
  • V. A. Lisovskiy and S. D. Yakovin "Scaling Law for a Low-Pressure Gas Breakdown in a Homogeneous DC Electric Field" JETP Letters, 2000, Vol. 72, No. 2, pp. 34-37.
  • V.A. Lisovskiy , S.D. Yakovin , V.D. Yegorenkov "Low-pressure gas breakdown in uniform dc electric field." J. Phys. D: Appl. Phys., 2000, V. 33, No. 21, p. 2722-2730.
  • V. A. Lisovskiy and S. D. Yakovin "Experimental Study of a Low-Pressure Glow Discharge in Air in Large-Diameter Discharge Tubes" Plasma Physics Reports, Vol. 26, No. 12, 2000, pp. 1066–1075.
  • V.A. Lisovskiy , S.D. Yakovin , V.D. Yegorenkov , A. Terent’eva "Plasma sterilisation in low-pressure rf discharge." Problems of atomic science and technology, 2000, No. 1, pp. 77-81.
  • V.A. Lisovskiy and S.D. Yakovin "Cathode Layer Characteristics of a Low-Pressure Glow Discharge in Argon and Nitrogen." Technical Physics Letters, 2000, Vol. 26, No. 10, pp. 891-893.
  • V. Lisovskiy, V. Yegorenkov, "Alpha–gamma transition in RF capacitive discharge in low-pressure oxygen", Vacuum, 2004, Vol. 74, Issue 1, pp. 19-28.
  • V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne, "Electron Drift Velocity Determination in Argon, Nitrogen and Hydrogen in Strong Electric Fields", Bulletin of the American Physical Society, 2004, Vol. 49, No. 5, p. 58.
  • V. Lisovskiy, S. Martins, K. Landry, D. Douai, J.-P. Booth, V. Cassagne, "Electron drift velocity in NH3 in strong electric fields determined from rf breakdown curves", J. Phys. D: Appl. Phys., 2005, Vol. 38, No.6, pp. 872-876.
  • V. Lisovskiy, J.-P. Booth, S. Martins, K. Landry, D. Douai, V. Cassagne, "Extinction of RF capacitive low-pressure discharges", Europhysics Letters, 2005, Vol. 71, No.3, pp.407-411.
  • V. Lisovskiy, S. Martins, K. Landry, D. Douai, J.-P. Booth, V. Cassagne, V. Yegorenkov, "The effect of discharge chamber geometry on the ignition of low-pressure rf capacitive discharges", Physics of Plasmas, 2005, Vol.12, No.9, p. 093505 (1-8).
  • V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne and V. Yegorenkov, “Electron drift velocity in argon, nitrogen, hydrogen, oxygen and ammonia in strong electric fields determined from rf breakdown curves”, J. Phys. D: Appl. Phys., 2006, Vol. 39, No. 4, pp. 660-665.
  • V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne, V. Yegorenkov, “Electron drift velocity in N2O in strong electric fields determined from rf breakdown curves”, J. Phys. D: Appl. Phys., 2006, Vol. 39, No. 9, pp. 1866–1871.
  • V. Lisovskiy, V. Yegorenkov, "Double layer onset inside the near-electrode sheath of a RF capacitive discharge in oxygen", Vacuum, 2006, Vol. 80, pp. 458–467.
  • V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne, V. Yegorenkov, "Modes and the alpha-gamma transition in rf capacitive discharges in N2O at different rf frequencies", Physics of Plasmas, 2006, Vol. 13, No. 10, p. 103505.
  • V. Lisovskiy, J.-P. Booth, K. Landry, D. Douai, V. Cassagne, V. Yegorenkov, "A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor", Eur. Phys. J. Appl. Phys., 2006, Vol.36, No.2, pp. 177–182.
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